Invisix, a semiconductor metrology company developing next-generation measurement tools for advanced chip manufacturing, has raised an oversubscribed €20 million seed round. The Dutch startup aims to use soft x-rays to spot manufacturing errors in high-end chips.

The round was led by Hitachi Ventures. The financing is notable for its size at the seed stage in a capital-intensive sector, with the company having been founded by alumni of ASML, the Dutch lithography giant.

Invisix operates in the chip metrology space, a critical but often overlooked segment of semiconductor manufacturing. As chip geometries shrink, detecting defects becomes exponentially harder, making tools like Invisix's essential for yield improvement. The market is dominated by established players like KLA and Applied Materials.

The oversubscribed nature of the round signals strong investor demand for deep-tech hardware solutions in the semiconductor supply chain, particularly from Europe. It also highlights a growing trend of ASML veterans launching startups to address adjacent challenges in chip fabrication.

Founded by former ASML engineers, the team brings deep domain expertise in optics and metrology. Hitachi Ventures' backing provides both capital and strategic ties to Japanese semiconductor manufacturing equipment markets.